Bottom-up filling of submicrometer capabilities in catalyst-Improved chemical vapor deposition of copper Overview of experimental results around the conformality of thermal ALD procedures. The coated EAR equals the EAR with the structure in the case of complete protection or is set by PD50 Molecular and viscous flowCosine dispersed/specular re-emission directionCoverage https://ald-applications82582.isblog.net/a-review-of-atomic-layer-deposition-36618753